Back to results
US 2006/0186337 A1Published application
Scanning electron microscope
AssigneeHitachi Science Systems, Ltd.
InventorsMichio Hatano, Sukehiro Ito, Shinichi Tomita, Junichi Katane
Life of this patent
Estimating the term…
Abstract
A scanning electron microscope includes an irradiation optical system for irradiating an electron beam to a sample; a sample holder for supporting the sample, arranged inside a sample chamber; at least one electric field supply electrode arranged around the sample holder; and an ion current detection electrode.
Claims14
A scanning electron microscope comprising:
- an irradiation optical system for irradiating an electron beam to a sample;
- a sample holder for supporting said sample, arranged inside a sample chamber;
- at least one electric field supply electrode arranged around said sample holder;
- and
- an ion current detection electrode;
- wherein said electric field supply electrode is arranged while covered with said ion current detection electrode.
3 more elements
A scanning electron microscope comprising:
- an irradiation optical system for irradiating an electron beam to a sample;
- a sample holder for supporting said sample;
- a sample chamber having said sample holder arranged therein;
- an electric field supply electrode for supplying an electric field for accelerating secondary electrons generated from said sample by irradiating an electron beam;
- and
- an ion current detection electrode arranged inside said sample chamber, for detecting ions generated by impingement of said secondary electrons accelerated against a residual gas inside said sample chamber;
- wherein said ion current detection electrode has an upper electrode and a lower electrode, and said electric field supply electrode is arranged between said upper electrode and said lower electrode.
4 more elements
Dependencies are inferred from the claim text.