Method for the production of a micromechanical part preferably used for fluidic applications, and micropump comprising a pump membrane made of a polysilicon layer

A method for producing a micromechanical component, the component being constructed of two functional layers, the two functional layers being patterned differently using micromechanical methods, the method for producing comprising:

• applying a first etch stop layer having a first pattern to a base plate;
• applying a first functional layer to the first etch stop layer and to first contact surfaces of the base plate;
• applying a second etch stop layer having a second pattern to the first functional layer;
• applying a second functional layer to the second etch stop layer and to second contact surfaces of the first functional layer;
• applying an etching mask to the second functional layer;
• and
• patterning the second functional layer and the first functional layer at least one of:
• i) by use of the first etch stop layer and the second etch stop layer by etching methods, and ii) by use of the first etch stop layer and the second etch stop layer as sacrificial layers.

A micropump, comprising:

• a pump chamber bordered by a cover plate and a pump diaphragm;
• and
• a pump diaphragm held on a base plate, a fluid being able to be sucked in via an intake and being able to be passed out via an outlet by a movement of the pump diaphragm;
• wherein the pump diaphragm is formed from a polysilicon layer.