Ceramic sensor and manufacturing method thereof

Abstract

The compatibility of increased sensitivity with both reliability and durability was difficult, since in a gas sensor composed of polycrystalline grains or ceramic particles, there is a trade-off relationship between increasing sensitivity through particle size reduction and change with time due to grain growth. Moreover, it was difficult to integrate a ceramic sensor with high sensitivity, high durability and high reliability with a Si integrated circuit in the monolith. A gas sensor is composed of an artificial nano-structure ceramic film where a change in the ceramic structure due to grain growth, etc. does not occur because of heat. The ceramic thin film is formed to a pattern shaped template on a nanometer level by using a sol-gel method and cured adequately to form precisely. Moreover, the above-mentioned gas sensor is integrated with an integrated circuit in the monolith.

Dependencies are inferred from the claim text.