Valve assembly having improved pump-down performance
AssigneeMKS Instruments, Inc.
InventorsPaul Lucas, Jaroslaw Pisera
Life of this patent
Estimating the term…
Abstract
A valve assembly including a housing having a flow path extending to an outlet and a valve seat in the flow path and around the outlet, a slide plate located in the housing and movable transversely to a longitudinal axis of the flow path between a closed position, in which the slide plate is in contact with the valve seat and blocks flow through the flow path, and an opened position, in which the slide plate allows flow through the flow path, and wherein at least one of the slide plate and the valve seat includes at least one passageway for providing a predetermined amount of conductance between the slide plate and the valve seat when the slide plate is in the closed position.
Claims22
A valve assembly comprising:
- a housing having a flow path extending to an outlet and defining a valve seat in the flow path and around the outlet;
- a slide plate located in the housing and movable transversely to a longitudinal axis of the flow path between a closed position, in which the slide plate is in contact with the valve seat and blocks flow through the flow path, and an opened position, in which the slide plate allows flow through the flow path;
- and
- wherein at least one of the slide plate and the valve seat includes at least one passageway for providing a predetermined amount of conductance between the slide plate and the valve seat when the slide plate is in the closed position.
Dependencies are inferred from the claim text.