Method of making low-E coating using ceramic zinc inclusive target, and target used in same
AssigneeGuardian Industries Corp.
InventorsYiwei Lu, Thomas Seder
Life of this patent
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Abstract
A ceramic target is used in sputter-depositing a contact layer adjacent an infrared (IR) reflecting layer in certain example embodiments. For example, a ZnOx ceramic target may be used in sputter-depositing a zinc oxide inclusive layer over and/or under a silver based IR reflecting layer in certain embodiments. In certain example embodiments, the ceramic target may be doped with a non-metal such as F and/or B.
Claims23
A method of making a coated article including a coating supported by a glass substrate, the method comprising:
- depositing an infrared (IR) reflecting layer on the substrate;
- sputtering a ceramic target comprising zinc oxide in forming a first layer comprising zinc oxide on the substrate, where the layer comprising zinc oxide directly contacts the IR reflecting layer and is located above or below the IR reflecting layer;
- and
- wherein the zinc oxide of the ceramic target is substoichiometric.
A method of making a coated article including a coating supported by a glass substrate, the method comprising:
- depositing an infrared (IR) reflecting layer on the substrate;
- sputtering a target comprising zinc oxide in forming a first layer comprising zinc oxide on the substrate, where the layer comprising zinc oxide directly contacts the IR reflecting layer and is located above or below the IR reflecting layer;
- and
- wherein the zinc oxide of the target is doped with from about 0.5 to 5.0% fluorine.
A method of making a coated article including a coating supported by a glass substrate, the method comprising:
- depositing an infrared (IR) reflecting layer on the substrate;
- sputtering a target comprising zinc in forming a first layer comprising zinc oxide on the substrate, where the layer comprising zinc oxide directly contacts the IR reflecting layer and is located above or below the IR reflecting layer;
- and
- wherein the target comprising zinc is doped with boron.
A sputtering target comprising:
- a material to be sputtered from the target, the material comprising one or more of:
- (a) substoichiometric zinc oxide;
- (b) zinc, or zinc oxide, doped with boron;
- and (c) zinc oxide doped with from about 0.5 to 5.0% fluorine.
A coated article comprising a multi-layer coating supported by a glass substrate, the coating comprising:
- at least one IR reflecting layer comprising silver;
- a layer comprising zinc oxide located above or below the IR reflecting layer, wherein the layer comprising zinc oxide directly contacts the IR reflecting layer;
- and
- wherein the layer comprising zinc oxide is doped with one or more of:
- (a) from about 0.5 to 5.0% fluorine, (b) from about 0.5 to 10.0% boron.
Dependencies are inferred from the claim text.