Semiconductor device, test apparatus and measurement method therefor

A semiconductor device for measuring delay time of a wiring under test provided therein comprising:

• a loop path on which the wiring under test is provided;
• a substrate bias control unit for applying a plurality of substrate bias voltages, which are different from each other, to a logic circuit connected on said loop path;
• a loop delay measuring unit for measuring delay time of said loop path;
• and
• a wiring delay estimating unit for estimating delay time of the wiring under test on the basis of the delay time of a plurality of loop paths corresponding to the plurality of the substrate bias voltages.

A semiconductor device for measuring delay time of a wiring under test provided therein comprising:

• a loop path;
• a path selecting unit for connecting one of the wiring under test and another wiring on said loop path;
• a loop delay measuring unit for measuring delay time of said loop path;
• and
• a delay time estimating unit for estimating delay time of the wiring under test on the basis of delay time of said loop path in case the wiring under test is connected on said loop path and delay time of said loop path in case the another wiring is connected on said loop path.

A testing apparatus for testing a device under test comprising:

• a pattern generating unit for generating a pattern of a test signal which is to be provided to the device under test;
• a timing generating unit for generating a timing signal which is an input pulse signal delayed by a predetermined time by a delay element;
• a waveform forming unit for forming a waveform of the test signal on the basis of the pattern and the timing signal;
• a driver for providing the device under test with the test signal;
• a comparator for outputting a logic value which is the result of comparing an output signal output from the device under test in response to the test signal with a reference voltage;
• and
• a logic comparing unit for determining pass/fail of the device under test by comparing the logic value with an expectation value,
• wherein said timing generating unit comprises:
• a loop path on which the wiring under test is provided;
• a delay element;
• a delay selecting unit for determining whether or not said delay element is connected on said loop path;
• a loop delay measuring unit for measuring delay time of said loop path;
• a first gate delay estimating unit for estimating delay time of said delay element by subtracting delay time of said loop path in case said delay element is not connected on said loop path from delay time of said loop path in case said delay element is connected on said loop path;
• a second gate delay estimating unit for estimating delay time of a logic circuit connected on said loop path on the basis of the delay time of said delay element regardless of whether or not said delay element is connected on said loop path;
• and
• a wiring delay estimating unit for estimating delay time of the wiring under test on the basis of the delay time of said loop path and the delay time of the logic circuit.

A method for measuring delay time of a wiring under test provided inside comprising:

• a loop path setting step of setting a loop path on which the wiring under test is provided;
• a delay selecting step of determining whether or not the delay element is connected on the loop path;
• a loop delay measuring step of measuring delay time of the loop path;
• a first gate delay estimating step of estimating delay time of the delay element by subtracting delay time of the loop path in case the delay element is not connected on the loop path from delay time of the loop path in case the delay element is connected on the loop path;
• a second gate delay estimating step of estimating delay time of a logic circuit connected on the loop path on the basis of the delay time of the delay element regardless of whether or not the delay element is connected on the loop path;
• and
• a wiring delay estimating step of estimating delay time of the wiring under test on the basis of the delay time of the loop path and the delay time of the logic circuit.

A method for measuring delay time of a wiring under test provided inside comprising:

• a loop path setting step of setting a loop path on which the wiring under test is provided;
• a substrate bias control step of applying a plurality of substrate bias voltages, which are different from each other, to a logic circuit connected on the loop path;
• a loop delay measuring step of measuring delay time of the loop path;
• and
• a wiring delay estimating step of estimating delay time of the wiring under test on the basis of the delay time of a plurality of loop paths corresponding to the plurality of the substrate bias voltages.

A method for measuring delay time of a wiring under test provided inside comprising:

• a path selecting step of connecting one of the wiring under test and another wiring on a loop path;
• a loop delay measuring step of measuring delay time of the loop path;
• and
• a delay time estimating step of estimating delay time of the wiring under test on the basis of delay time of the loop path in case the wiring under test is connected on the loop path and delay time of the loop path in case the another wiring is connected on the loop path.