Method for detecting and monitoring wafer probing process instability
AssigneeSystems on Silicon Manufacturing Co. Pte. Ltd.
InventorBen Tan
Life of this patent
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Abstract
A system and method for detecting and monitoring wafer probe stability including the steps of, probing each die on a wafer, and for each die determining whether the result of the probe is a pass or a fail. If the result of a probe is a fail, re-probing the die and determining whether the re-probe is a pass or a fail. Once all the dies have been probed determining the rate of die re-probes that lead to passes, comparing the rate of passes on re-probes to a pre-determined limit, and if the rate of passes on re-probes is greater than the predetermined limit, assigning the probe status as unstable.
Claims18
A method for detecting and monitoring wafer probe stability including the steps of:
- probing each die on a wafer;
- for each die determining whether the result of the probe is a pass or a fail;
- if the result of a probe is a fail, re-probing the die and determining whether the re-probe is a pass or a fail;
- once all the dies have been probed determining the rate of die re-probes that lead to passes;
- comparing the rate of passes on re-probes to a pre-determined limit;
- and
- if the rate of passes on re-probes is greater than the predetermined limit, assigning the probe status as unstable.
A system for detecting and monitoring wafer probe stability including the system arranged to:
- probe each die on a wafer;
- for each die determine whether the result of the probe is a pass or a fail;
- if the result of a probe is a fail, re-probe the die and determine whether the re-probe is a pass or a fail;
- once all the dies have been probed determine the rate of die re-probes that lead to passes;
- compare the rate of passes on re-probes to a pre-determined limit;
- and
- if the rate of passes on re-probes is greater than the predetermined limit, assign the probe status as unstable.
Dependencies are inferred from the claim text.