System and method for processing a substrate and program therefor

A substrate processing method for performing a processing including a plurality of processes on a substrate by operating a multiplicity of devices incorporated in a substrate processing apparatus, the method comprising the steps of:

• storing commands defining operations of the devices;
• generating macro files from the stored commands and creating a process sequence macro by combining the generated macro files, each of the macro files corresponding to each of the plurality of processes;
• and
• executing the process sequence macro.

A program for executing a substrate processing method for performing a processing including a plurality of processes on a substrate by operating a multiplicity of devices incorporated in a substrate processing apparatus, wherein the program's operations executed on a computer comprises:

• a storage module for storing therein commands describing operations of the devices;
• a generation module for generating macro files form the stored commands and creating a process sequence macro by combining the generated macro files, each of the macro files corresponding to each of the plurality of processes;
• and
• an execution module for executing the process sequence macro.

A program for performing a substrate processing method for conducting a processing on a substrate by using a substrate processing system including a substrate processing apparatus;

• a controller equipped with an operation input unit through which an operation of a user is inputted to control an operation of the substrate processing apparatus;
• and a remote terminal isolated from the substrate processing apparatus and equipped with another operation input unit through which an operation of a user is inputted,
• wherein the program's operations executed on a computer comprises:
• an operation control module for controlling an operation of the operation input unit;
• and
• another operation control module for controlling an operation of said another operation unit.

A program for performing a substrate processing method for conducting a processing on a substrate by using a substrate processing system including a substrate processing apparatus;

• a controller equipped with an operation input unit through which an operation of a user is inputted to control an operation of the substrate processing apparatus;
• and a remote terminal isolated from the substrate processing apparatus and equipped with another operation input unit through which an operation of a user is inputted,
• wherein the program's operations executed on a computer comprises:
• a display module for displaying operation items that can be inputted to the operation input unit;
• and
• a remote input module for displaying the operation items on said another operation input unit and recognizing an input to said another operation input unit as an input to the operation input unit.