A computer software product for distributing a computational task for an integrated circuit layout design on a reticle field wide basis among a collection of networked computation nodes, the product comprising a computer-readable medium in which program instructions are stored, which instructions, when read by a computer, cause the computer to:
- generate a plurality of templates building a litho hierarchy tree for the entire reticle field in accordance with the placement information of the chip layout across the reticle field;
- assign the computation tasks for the templates to the networked computation nodes for concurrent execution;
- and
- assemble outputs from the computation nodes.