Analysis apparatus and method comprising auto-focusing means

An analysis method, in particular a spectroscopic analysis method, for analyzing an object comprising the steps of:

• emitting an excitation beam by an excitation system to excite a target region,
• emitting a monitoring beam by a monitoring system to image the target region by an imaging system,
• detecting scattered radiation from the target region generated by the excitation beam by a detection system,
• focusing the excitation system, the monitoring system and the detection system on a detection plane in the target region by a focusing means,
• determining image characteristics, which indicate if the imaging system is focused on the object to be analyzed, from a detected image, and
• controlling the focusing means to change the focusing of the monitoring system, the excitation system and the detection system based on the determined image characteristics, controlling the monitoring system to image the target region, and controlling the image processing means to determine the image characteristics from a detected image until the object substantially lies in the detection plane.

An optical focusing system for focusing on a target point of an object, comprising:

• a target system to be focused on the target point,
• a monitoring system comprising a monitoring beam source for emitting a monitoring beam and an imaging system to image the target region,
• focusing means for focusing the target system and the monitoring system on a detection plane in the target region,
• image processing means for determining image characteristics, which indicate if the imaging system is focused on the object to be analyzed, from a detected image, and
• auto-focusing means for controlling the focusing means to change the focusing of the monitoring system and the target system based on the determined image characteristics, for controlling the monitoring system to image the target region and for controlling the image processing means to determine the image characteristics from a detected image until the object substantially lies in the detection planed.