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US 2006/0142504 A1Published application
Novel polymer and production of nano-porous low dielectric polymer composite film using the same
OwnerMoonhor Ree, Weontae Oh +2inventors
InventorsMoonhor Ree, Weontae Oh, Yongtaek Hwang, Byeongdu Lee
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Abstract
A star-shaped polymer having an alkoxy silane end group and containing an ether group at the center thereof, which is represented by formula (I), is useful as a pore introducer to obtain a low dielectric silicate polymer film having nano-pores distributed regularly and evenly. The star-shaped polymer is prepared by comprising conducting a ring open polymerization of a cyclic monomer and a polyhydric alcohol, and reacting the resulting polymer with an alkoxy silane compound.
Claims13
A polymer represented by formula (I):
- wherein Ro is —CH2O—[CO—(CH2)n—O]m—X, —CH2O—[CH2O]3m—X, —CH2O—[(CH2)n—O]m—X or —CH2O—[CONH—(CH2)n]m—X;
- X is SiR3k (OR4)3-k;
- R1 is C1-5 alkyl or Ro;
- R2 is C1-4 alkylene or arylene;
- R3 and R4 are each independently C1-5 alkyl;
- and
- n is an integer in the range of 2 to 5, m is an integer in the range of 2 to 20 and k is an integer in the range of 0 to 2.
4 more elements
Dependencies are inferred from the claim text.