Interlocking via for package via integrity
OwnerViren Khandekar, Jesus Munoz +2inventors
InventorsViren Khandekar, Jesus Munoz, Lilia Benigra-Unite, Mario Tobias
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OwnerViren Khandekar, Jesus Munoz +2inventors
InventorsViren Khandekar, Jesus Munoz, Lilia Benigra-Unite, Mario Tobias
Estimating the term…
A method of forming an interconnection structure in a microelectronic package, and an interconnection structure of a microelectronic package formed according to the method. The method includes: providing a combination including a first conductive layer and a dielectric layer fixed to the conductive layer; providing a hole through the dielectric layer extending from a surface of the dielectric layer to the first conductive layer; providing a recess in the first conductive layer and in communication with the hole to provide an interlocking volume under the dielectric layer; providing a conductive material in the hole and in the recess to form a package via having an interlocking section in the interlocking volume of the recess; and providing a conductive material on the dielectric layer to form a second conductive layer adapted to be in electrical contact with the first conductive layer through the package via.
A method of forming an interconnection structure in a microelectronic package, comprising:
An interconnection structure of a microelectronic package comprising:
A system comprising:
Dependencies are inferred from the claim text.