CMOS image sensor and method for fabricating the same
OwnerChang Leeinventor
Life of this patent
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Abstract
A CMOS image sensor and a method for fabricating the same prevent a lifting phenomenon of a microlens. The CMOS image sensor includes a semiconductor substrate structure in which at least one photodiode is disposed, an insulating interlayer formed on the semiconductor substrate structure, a patterned metal layer formed on the insulating interlayer, an oxide layer formed on the insulating interlayer including the patterned metal layer, a passivation layer formed on the oxide layer, and at least one microlens formed in direct contact with the oxide layer, wherein the oxide layer and the passivation layer are etched to form a plurality of openings that correspond to the at least one microlens.
Claims16
A CMOS image sensor, comprising:
- a semiconductor substrate structure in which at least one photodiode is disposed;
- an insulating interlayer formed on said semiconductor substrate structure;
- a patterned metal layer formed on said insulating interlayer;
- an oxide layer formed on said insulating interlayer including said patterned metal layer;
- a passivation layer formed on said oxide layer;
- and
- at least one microlens formed in direct contact with said oxide layer,
- wherein said oxide layer and said passivation layer are etched to form a plurality of openings that correspond to said at least one microlens.
A method for fabricating a CMOS image sensor, comprising:
- forming an insulating interlayer on a semiconductor substrate structure in which at least one photodiode is disposed;
- forming a patterned metal layer on the insulating interlayer;
- forming an oxide layer on the insulating interlayer including the patterned metal layer;
- forming a passivation layer on the oxide layer;
- etching each of the oxide layer and the passivation layer to form a plurality of openings;
- and
- forming at least one microlens in at least one of the plurality of openings to be in direct contact with the oxide layer.
Dependencies are inferred from the claim text.