Single-crystal-silicon 3D micromirror

A three-dimensional free space micromirror device comprising:

• single crystal silicon micromirrors;
• single crystal silicon thermal actuators;
• and
• single crystal silicon flexible springs connecting said thermal actuators to said micromirrors.

A three-dimensional free space micromirror device comprising mirror elements wherein each mirror element comprises:

• one single crystal silicon micromirror;
• a single crystal silicon flexible spring at each of four corners of said micromirror;
• and
• four single crystal silicon thermal actuators, one joined to said micromirror through each of said flexible springs;
• and
• fixed supports on a substrate attached to each of said thermal actuators.

A three-dimensional free space micromirror device comprising mirror elements wherein each mirror element comprises:

• one single crystal silicon micromirror;
• a single crystal silicon flexible spring at each of four corners of said micromirror;
• and
• four single crystal silicon thermal actuators, one joined to said micromirror through each of said flexible springs;
• and
• a bond pad on each of said thermal actuators wherein said thermal actuators are attached to fixed supports on a substrate through said bond pads.