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US 2006/0141658 A1Published application
Corrugated diaphragm
OwnerEyal Bar-Sadeh, Guy Berlinerinventors
Life of this patent
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Abstract
A diaphragm includes a substrate having a hole and a sheet of material formed on the substrate and covering the hole. The sheet of material includes one or more corrugations that are substantially free of defects. A method of forming the diaphragm includes forming a corrugated surface free of stringers on the substrate, forming a layer of material on the corrugated surface, and processing the substrate to form the diaphragm including the layer of material.
Claims10
A method of forming a diaphragm, comprising:
- forming a corrugated surface free of stringers on a substrate;
- forming a layer of material on the corrugated surface;
- and
- processing the substrate to form the diaphragm including the layer of material.
1 more element
A method of forming a diaphragm, comprising:
- etching a structure on a surface of a substrate;
- forming a layer of silicon dioxide on the structure;
- etching the layer of silicon dioxide;
- and
- forming a layer of silicon nitride on the structure and processing the substrate to form the diaphragm from the layer of silicon nitride.
2 more elements
A method for detecting an acoustic wave comprising:
- receiving an acoustic wave at a diaphragm including a sheet of material formed on a substrate having a hole, the sheet of material covering the hole and including one or more corrugations that are substantially free of defects;
- and
- detecting a deflection of the sheet of material.
Dependencies are inferred from the claim text.