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US 2006/0141656 A1Published application
Micromechanical sensors and methods of manufacturing same
AssigneeInfineon Technologies AG
InventorsAlfons Dehe, Marc Fueldner
Life of this patent
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Abstract
A micromechanical sensor and, in particular, a silicon microphone, includes a movable membrane and a counter element in which perforation openings are formed, opposite to the movable membrane via a cavity. The perforation openings are formed by slots, the width of which maximally corresponds to double the spacing defined by the cavity between the membrane and the counter element.
Claims10
A method of manufacturing a micromechanical sensor, comprising the following steps:
- producing slot-formed perforation openings in a layer;
- producing an essentially planar oxide layer on the layer in which the perforation openings are formed, with a thickness corresponding to the future distance between a counter element and a membrane of the micromechanical sensor, using a front-side oxide deposition on the layer provided with the perforation openings, wherein the width of the slot-formed perforation openings maximally corresponds to double the thickness of the oxide layer;
- depositing the membrane onto the essentially planar oxide layer;
- and
- performing of etching for opening the perforation openings and for producing a cavity in the oxide layer between the membrane and the counter element in which the perforation openings are formed.
2 more elements
Dependencies are inferred from the claim text.