Chemically amplified positive photoresist composition for thick film, thick-film photoresist laminated product, manufacturing method for thick-film resist pattern, and manufacturing method for connection terminal
AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsToshiki Okui, Koichi Misumi, Koji Saito
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Abstract
A chemically amplified positive photoresist composition for thick film that is used for forming a thick-film photoresist layer with a film thickness of 10 to 150 μm on top of a support, comprising (A) a compound that generates acid on irradiation with active light or radiation, (B) a resin that displays increased alkali solubility under the action of acid, and (C) an alkali-soluble resin, wherein the component (B) comprises a resin formed from a copolymer containing a structural unit (b1) with a specific structure.
Claims14
A chemically amplified positive photoresist composition for a thick film that is used for forming a thick-film photoresist layer with a film thickness of 10 to 150 μm on top of a support, comprising the following components:
- (A) a compound that generates an acid upon irradiation with active light or radiation;
- (B) a resin that displays increased alkali solubility under the action of the acid;
- and
- (C) an alkali-soluble resin, wherein
- said component (B) comprises a resin formed from a copolymer containing a structural unit (b1) represented by a general formula (1) shown below:
- (wherein, R1 represents a hydrogen atom or a methyl group, and R2 represents an acid-labile group), and wherein
- said component (C) comprises an acrylic resin (c1), and/or a vinyl resin (c2), wherein said vinyl resin (c2) is a poly(vinyl low alkyl ether), and comprises a (co)polymer produced by polymerizing either a single vinyl low alkyl ether represented by a general formula (8) shown below, a mixture of two of more of said ethers.
- (wherein in the general formula (8), R12 represents a straight chain or branched alkyl group of 1 to 5 carbon atoms)
(canceled)
Dependencies are inferred from the claim text.