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AssigneesIndustrial Technology Research Institute, Toth Information System, Inc.
InventorsTien-Heng Huang, Ren-Jye Wu, Wen-Hsuan Chao, Lih-Ping Wang, Hung-Chiao Cheng, Jassy Wang, Shu-Hei Wang, John Rodgers
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A cadmium tin oxide (Cd1-xSnxO) multi-layer laminate is disclosed. The laminate comprises: a substrate; and a layer of Cd1-xSnxO which is not an epitaxial structure; wherein, the composition of Sn/(Cd+Sn) is 1˜20%. The method for producing the Cd1-xSnxO multi-layer laminate is also described here. The method comprises steps of: (a) providing metal or oxide targets for sputtering films of Cd1-xSnxO; and (b) sputtering films of Cd1-xSnxO from the targets onto the substrate; wherein the composition of Sn/(Cd+Sn) is 1˜20%.
A cadmium tin oxide, Cd1-xSnxO, multi-layer laminate comprises:
A sputtering method for preparing the multi-layer laminate having a non-epitaxial cadmium tin oxide layer, wherein the atomic ratio of tin to cadmium and tin of said cadmium tin oxide layer is 1˜20%.
Dependencies are inferred from the claim text.