Processes for forming layers for electronic devices using heating elements
OwnerJian Wang, Gang Yuinventors
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Abstract
A process for forming an electronic device includes placing a substrate adjacent to a heating element and a deposition source, wherein the deposition source lies between the substrate and the heating element. In one embodiment, the process also includes sending a multiple pulsed signal to the heating element such that the heating element is on and off for a plurality of times. In another embodiment, the process also includes sending a signal to the heating element and depositing a layer over the substrate. Either or both processes further includes depositing a layer over the substrate. Depositing occurs as a result of sending the multiple pulsed signal to the heating element. The layer includes a material from the deposition source.
Claims20
A process for forming an electronic device comprising:
- placing a substrate adjacent to a heating element and a deposition source, wherein the deposition source lies between the substrate and the heating element;
- sending a multiple pulsed signal to the heating element such that the heating element is on and off for a plurality of times;
- and
- depositing a layer over the substrate, wherein:
- depositing occurs as a result of sending the multiple pulsed signal to the heating element;
- and
- the layer comprises a material from the deposition source.
A process for forming an electronic device comprising:
- placing a substrate under a heating element and a deposition source, wherein the deposition source lies between the substrate and the heating element;
- sending a signal to the heating element;
- and
- depositing a layer over the substrate, wherein:
- depositing occurs as a result of sending the signal to the heating element;
- and
- the layer comprises a material from the deposition source.
Dependencies are inferred from the claim text.