Microstructure, microreactor, micro heat exchanger and method for fabricating microstructure
AssigneeFuji Xerox Co., Ltd.
InventorsKazuaki Tabata, Takayuki Yamada, Mutsuya Takahashi, Yoshihisa Yamazaki
Life of this patent
Estimating the term…
Abstract
A microstructure includes first and second plates. The first plate defines a recess. The second plate is bonded to the first plate to block an opening of the recess to thereby form a closed vacuum space or a closed space filled with inert gas.
Claims17
A microstructure comprising:
- a first thin plate defining a recess;
- and
- a second thin plate bonded to the first thin plate to block an opening of the recess to thereby form a closed vacuum space or a closed space filled with inert gas.
A microstructure comprising:
- a first thin plate defining a through-hole;
- and
- a pair of second thin plates bonded to respective surfaces of the first thin plate to block openings of the through-hole to thereby form a closed vacuum space or a closed space filled with inert gas.
A microreactor formed of a plurality of laminated plates, the microreactor comprising:
- a reaction portion in which a plurality of source fluid react with one another;
- and
- a closed space having a heat-insulating function or a heat exchanging function, the closed space giving a predetermined reaction environment to the reaction portion.
A micro heat exchanger comprising:
- a first thin plate defining a recess;
- and
- a second thin plate bonded to the first thin plate to block an opening of the recess to thereby form a closed space filled with inert gas.
A micro heat exchanger comprising:
- a first thin plate defining a through-hole;
- and
- a pair of second thin plates bonded to respective surfaces of the first thin plate to block openings of the through-hole to thereby form a closed space filled with inert gas.
A method of fabricating a microstructure that comprises a closed vacuum space or a closed space filled with inert gas, the method comprising:
- forming a first thin plate and a second thin plate on a plate-forming substrate, the first thin plate defining a recess;
- and
- successively transferring the first and second thin plates from the thin plate-forming substrate to a target substrate in a vacuum or in an inert gas atmosphere while bonding the second thin plate to the first thin plate to block an opening of the recess to thereby form the closed vacuum space or the closed space filled with inert gas.
A method of fabricating a microstructure that comprises a closed vacuum space or a closed space filled with inert gas, the method comprising:
- forming a first thin plate and a pair of second thin plates on a thin plate-forming substrate, the first thin plate defining a through-hole;
- and
- successively transferring the first thin plate and the second thin plates from the thin plate-forming substrate to a target substrate in a vacuum or in an inert gas atmosphere while bonding the second thin plates to respective surfaces of the first thin plate to block openings of the through-hole to thereby form the closed vacuum space or the closed space filled with inert gas.
Dependencies are inferred from the claim text.