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US 2006/0140795 A1Published application
Vacuum pumping arrangement
AssigneeEdwards Limited
InventorNigel Schofield
Life of this patent
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Abstract
A vacuum pumping arrangement comprises a turbomolecular pumping mechanism and a molecular drag pumping mechanism connected in series. A rotor of the molecular drag pumping mechanism is supported by the rotor blades of the turbomolecular pumping mechanism.
Claims19
A vacuum pumping arrangement comprising:
- a turbomolecular pumping mechanism having a rotor, wherein the rotor comprises rotor blades;
- and
- a molecular drag pumping mechanism connected in series with the turbomolecular pumping mechanism, wherein a rotor of the molecular drag pumping mechanism is supported by the rotor blades of the turbomolecular pumping mechanism.
Dependencies are inferred from the claim text.