Vacuum pumping arrangement
OwnerNigel Schofieldinventor
Life of this patent
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Abstract
A vacuum pumping arrangement comprises a drive shaft, a motor for driving said drive shaft, a molecular pumping mechanism and a regenerative pumping mechanism. The drive shaft is arranged for simultaneously driving the molecular pumping mechanism and the regenerative pumping mechanism. The drive shaft is supported by a lubricant free bearing associated with the molecular pumping mechanism.
Claims17
A vacuum pumping arrangement comprising a drive shaft, a motor for driving the drive shaft, a molecular pumping mechanism and a regenerative pumping mechanism, wherein the drive shaft is arranged for simultaneously driving the molecular pumping mechanism and the regenerative pumping mechanism and the drive shaft is supported by a lubricant free bearing associated with the molecular pumping mechanism.
A vacuum pumping arrangement comprising a drive shaft, a motor for driving the drive shaft, and a regenerative pumping mechanism, the drive shaft being supported towards one end thereof by a lubricant free bearing and towards the other end thereof by a lubricated bearing, the regenerative pumping mechanism comprising a stator comprising a plurality of circumferential pumping channels disposed about a longitudinal axis of the drive shaft and a rotor comprising a plurality of arrays of rotor blades extending axially into the respective circumferential pumping channels, the rotor being connected to the drive shaft so as to be sufficiently close to the lubricated bearing so that radial movement of the drive shaft at the lubricant free bearing translates substantially to axial movement of the rotor blades relative to the respective circumferential pumping channels.
Dependencies are inferred from the claim text.