Micro-resonator, frequency filter and communication apparatus
AssigneeSony Corporation
InventorKoji Naniwada
Life of this patent
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Abstract
A highly reliable micro-resonator and communication apparatus is provided in which an influence on a substrate caused by an interaction generated by an oscillation between adjacent micro-resonant elements is eliminated. The micro-resonant element includes a plurality of micro-resonant elements using a micro-mechanical oscillation provided on the same substrate, in which a micro-resonant element to oscillate in a first phase and a micro-resonant element to oscillate in a second phase that is a reverse phase to the first phase are disposed to be a pair.
Claims13
A micro-resonator comprising:
- a plurality of micro-resonant elements using a micro-mechanical oscillation provided on the same substrate,
- wherein a micro-resonant element to oscillate in a first phase and a micro-resonant element to oscillate in a second phase that is a reverse phase to the first phase are disposed to be a pair.
A micro-resonator comprising:
- a plurality of micro-resonant elements connected electrically in parallel, including
- an input electrode and output electrode disposed on the same substrate and
- a beam that becomes an oscillation plate disposed to face said input electrode and output electrode separated by a space,
- wherein either said input electrodes or output electrodes are disposed to face each other.
A frequency filter comprising:
- a micro-resonator including
- a plurality of micro-resonant elements using a micro-mechanical oscillation provided on the same substrate,
- wherein a micro-resonant element to oscillate in a first phase and a micro-resonant element to oscillate in a second phase that is a reverse phase to the first phase are disposed to be a pair.
A frequency filter comprising:
- a micro-resonator including
- a plurality of micro-resonant elements connected electrically in parallel, which have
- an input electrode and output electrode disposed on the same substrate and
- a beam that becomes an oscillation plate disposed to face said input electrode and output electrode separated by a space,
- wherein either said input electrodes or output electrodes are disposed to face each other
A communication apparatus including a filter to limit a band of a transmission signal and/or reception signal, comprising as said filter:
- a filter including a micro-resonator having
- a plurality of micro-resonant elements using a micro-mechanical oscillation provided on the same substrate,
- wherein a micro-resonant element to oscillate in a first phase and a micro-resonant element to oscillate in a second phase that is a reverse phase to the first phase are disposed to be a pair.
A communication apparatus including a filter to limit a band of a transmission signal and/or reception signal, comprising as said filter:
- a filter including a micro-resonator having
- a plurality of micro-resonant elements connected electrically in parallel, provided with
- an input electrode and output electrode disposed on the same plane and
- a beam that becomes an oscillation plate disposed to face said input electrode and output electrode separated by a space,
- wherein either said input electrodes or output electrodes are disposed to face each other.
Dependencies are inferred from the claim text.