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US 2006/0140530 A1Published application
Symmetric optical modulator with low driving voltage
AssigneeKorea Electronics Technology Institute
InventorsWoo Kyung Kim, Woo Seok Yang, Han Young Lee
Life of this patent
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Abstract
A symmetric optical modulator with low driving voltage, wherein polarization of any one of branched waveguides formed on a substrate is inverted, and the two branched waveguides are simultaneously controlled by a center electrode formed on a top portion thereof, thereby ensuring a low voltage driving and embodying a characteristic of there being no signal distortion due to chirp.
Claims7
A symmetric optical modulator with low driving voltage, comprising:
- a substrate;
- an optical waveguide composed of an input portion, a pair of first and second branch portions branched off from the input portion, and an output portion where the first and second branch portions are combined, all of which are formed inwardly on a top surface of a substrate;
- a polarization inversion region polarized and inverted by a region of the substrate including any one of the first and second branch portions of the optical waveguide;
- first to third grooves formed by etching portions of the substrate adjacent to the sides of the first and second branch portions of the optical waveguide;
- a buffer layer formed on the top surface of the substrate except over said first to third grooves;
- a center electrode formed on a top surface of the buffer layer over the first and second branch portions of the optical waveguide located between the first and third grooves and extending uniformly there between;
- and
- first and second side electrodes formed on the top surface of the buffer layer adjacent to the first and third grooves, respectively, and said side electrodes being independent of the center electrode.
5 more elements
(canceled)
A symmetric optical modulator with low driving voltage comprising:
- a substrate;
- an optical waveguide composed of an input portion, a pair of first and second branch portions branched off from the input portion, and an output portion where the first and second branch portions are combined, all of which are formed inwardly on a top surface of the substrate;
- a polarization inversion region polarized and inverted by a region of the substrate including any one of the first and second branch portions of the optical waveguide;
- first to third grooves formed by etching portions of the substrate adjacent to the sides of the first and second branch portions of the optical waveguide;
- a buffer layer formed on a top surface of the first and second branch portions and the second groove;
- a center electrode formed on a top surface of the buffer layer over the first and second branch portions of the optical waveguide located on the first and third grooves and extending uniformly there between;
- and
- first and second side electrodes formed on the top surface of the buffer layer adjacent to the first and third grooves, respectively, and being independent of the center electrode.
5 more elements
A method for fabricating a symmetric optical modulator with low driving voltage comprising the steps of:
- forming an optical waveguide on a substrate, said optical waveguide being composed of an input portion, a pair of first and second branch portions branched off from the input portion, and an output portion where the first and second branch portions are combined;
- inverting and polarizing a region of the substrate including any one region of the first and second branch portions of the optical waveguide;
- applying a buffer layer onto a top surface of the substrate;
- forming first and second mask layers on regions of the buffer layer over the first and third grooves excluding the second groove located between the first and second branch portions, and then forming a center electrode and first and second side electrodes on a top surface of the buffer layer divided by the first and second mask layers;
- and
- removing the first and second mask layers, and then removing portions of the buffer layer below the first and second mask layers.
3 more elements
(canceled)
Dependencies are inferred from the claim text.