Ferroelectric film and method of manufacturing the same
AssigneeSeiko Epson Corporation
InventorsTakeshi Kijima, Yasuaki Hamada, Tomokazu Kobayashi
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Abstract
A method of manufacturing a ferroelectric film including: (a) mixing a polycarboxylate containing niobium, a polycarboxylate containing bismuth, a polycarboxylic acid or a polycarboxylic acid ester, and an organic solvent; and (b) applying the resulting mixed solution to a substrate and heat-treating the applied mixed solution to form a ferroelectric film including BiNbO4.
Claims16
A ferroelectric film, comprising BiNbO4.
A method of manufacturing a ferroelectric film, the method comprising:
- (a) mixing a polycarboxylate containing niobium, a polycarboxylate containing bismuth, a polycarboxylic acid or a polycarboxylic acid ester, and an organic solvent;
- and
- (b) applying the resulting mixed solution to a substrate and heat-treating the applied mixed solution to form a ferroelectric film including BiNbO4.
A method of manufacturing a ferroelectric film, the method comprising:
- (a) mixing a sol-gel raw material including a hydrolysis-condensation product of a metal alkoxide containing niobium, a sol-gel raw material including a hydrolysis-condensation product of a metal alkoxide containing bismuth, a polycarboxylic acid or a polycarboxylic acid ester, and an organic solvent, and causing the polycarboxylic acid or a polycarboxylic acid derived from the polycarboxylic acid ester to undergo esterification with the metal alkoxide containing niobium and the metal alkoxide containing bismuth to prepare a ferroelectric precursor composition;
- and
- (b) applying the precursor composition to a substrate and heat-treating the applied precursor composition to form a ferroelectric film including BiNbO4.
A ferroelectric raw material solution, comprising:
- a polycarboxylate containing niobium;
- a polycarboxylate containing bismuth;
- a polycarboxylic acid or a polycarboxylic acid ester;
- and
- an organic solvent.
A ferroelectric raw material solution, comprising:
- a sol-gel raw material including a hydrolysis-condensation product of a metal alkoxide containing niobium;
- a sol-gel raw material including a hydrolysis-condensation product of a metal alkoxide containing bismuth;
- a polycarboxylic acid or a polycarboxylic acid ester;
- and
- an organic solvent.
A ferroelectric capacitor, comprising a ferroelectric film including BiNbO4.
A ferroelectric memory, comprising a ferroelectric film including BiNbO4.
Dependencies are inferred from the claim text.