Uniformity correction system having light leak compensation
AssigneeASML Holding N.V.
InventorDouglas Casault
Life of this patent
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Abstract
A system and method for uniformity correction having light leak compensation is provided. The system includes multiple correction elements. The correction elements can be moved within an illumination slot. Adjacent correction elements are separated by a gap. Each correction element includes a compensation portion and a normal attenuation portion. The compensation portion has a first attenuation and normal attenuation portion has a second attenuation. The width of the compensation portion is equivalent to the width of the gap between adjacent fingers. The compensation portion can be band on a surface of the correction element. The band extends from a first point on a longitudinal edge of the correction element to a second point on a longitudinal edge of the correction element.
Claims20
A uniformity correction system comprising:
- a plurality of correction elements, each correction element including a compensation portion and a normal attenuation portion,
- wherein the compensation portion has a first attenuation and the normal attenuation portion has a second attenuation.
A uniformity correction system comprising:
- a plurality of correction elements, each correction element having a first surface and a second surface,
- wherein each correction element has a compensation band on the first surface, and
- wherein, for each correction element, the compensation band has a first attenuation and the correction element has a second attenuation.
A uniformity correction system comprising:
- a plurality of correction elements, each correction element having a first surface and a second surface,
- wherein each correction element has a compensation band on the second surface, and
- wherein, for each correction element, the compensation band has a first attenuation and the correction element has a second attenuation.
Dependencies are inferred from the claim text.