Probe mark reading device and probe mark reading method

A probe mark test device for checking probe marks formed on electrode pads during checking of electrical characteristics of a prescribed object including a plurality of electrode pads, comprising:

• an initial vector calculator for calculating an initial vector equivalent to a vector drawn from a position of a pre-registered model probe mark relating to a prescribed electrode pad selected from the plurality of electrode pads to a position of a probe mark included in an image for the electrode pad obtained by photographing the electrode pad;
• and
• a probe mark quality determination unit for determining whether or not a probe mark formed on an electrode pad different to the prescribed electrode pad is detected within a prescribed determination range including a position in the direction and distance of the initial vector from the position of the pre-registered probe mark relating to the different electrode pad.

11-14. (canceled)

A probe mark test method for checking probe marks formed on electrode pads during checking of electrical characteristics of a prescribed object including a plurality of electrode pads, comprising:

• an initial vector calculating step of calculating an initial vector equivalent to a vector drawn from a position of a pre-registered model probe mark relating to a prescribed electrode pad selected from the plurality of electrode pads to a position of a probe mark including an image for the electrode pad obtained by photographing the electrode pad;
• and
• a probe mark quality determination step of determining whether or not a probe mark formed on an electrode pad different to the prescribed electrode pad is detected within a prescribed determination range including a position in the direction and distance of the initial vector from the position of the pre-registered probe mark relating to the different electrode pad.