Device and method for inspecting matrix substrate
AssigneeInnolux Display Corp.
InventorsChih-Cheng Lin, Tse Wu
Life of this patent
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Abstract
A device (2) for inspecting a matrix substrate (26) includes a light source (22), an electro-optical device (20) determining whether light beams penetrate through or not, a photodetector (23) positioned at one side of the electro-optical device and a host computer (24) connected with the photodetector. A matrix substrate is positioned between the electro-optical device and the light source. The device is used to receive image data, and then the image data is compared with the predefined data to determine whether defects on the matrix substrate exist. Efficiency of inspection can be significantly improved. A related method is also provided.
Claims13
A device for inspecting a matrix substrate, comprising:
- a light source for being positioned at a first side of the matrix substrate;
- an electro-optical device, for being positioned at an opposite second side of the matrix substrate, and for determining whether light beams penetrate through the electro-optical device;
- a photodetector, for being positioned at one side of the electro-optical device opposite from the matrix substrate;
- and
- a host computer connected with the photodetector.
A method for inspecting a matrix substrate having thin-film transistors, the method including the steps of:
- positioning the matrix substrate between a light source and an electro-optical device;
- switching the thin-film transistors to activate the electro-optical device so that the electro-optical device is in a WHITE state or a BLACK state;
- using a photodetector to take an image of the electro-optical device, and supplying corresponding image data to a host computer;
- and
- comparing the image data with predefined data to determine whether one or more defects of the matrix substrate exist;
- and if so, where the one or more defects exist.
Dependencies are inferred from the claim text.