Back to results
US 2006/0139450 A1Published application
System, method and apparatus for in-situ substrate inspection
AssigneeLam Research Corporation
InventorsAleksander Owczarz, Jaroslaw Winniczek, Luai Nasser, Alan Schoepp, Fred Redeker, Erik Edelberg
Life of this patent
Estimating the term…
Abstract
A system for inspecting a substrate includes a camera and a light source. The camera is oriented toward a field of view. The field of view encompasses at least a first portion of a first surface of the substrate. The light source is oriented toward the field of view at a first angle β relative to the first surface of the substrate. A method for inspecting a substrate is also included.
Claims20
A system for inspecting a substrate comprising:
- a camera oriented toward a field of view, wherein the field of view encompasses at least a first portion of a first surface of the substrate;
- and
- a light source oriented toward the field of view at a first angle β relative to the first surface of the substrate.
A system for inspecting a substrate, comprising:
- a first camera oriented toward a first field of view, wherein the first field of view encompasses at least a first portion of a first surface of the substrate;
- a first light source oriented toward the first field of view at a first angle β relative to the first surface of the substrate;
- a second camera oriented toward a second field of view, wherein the second field of view encompasses at least a second portion of a second surface of the substrate;
- and
- a second light source oriented toward the second field of view at a second angle β′ relative to the second surface of the substrate.
2 more elements
A method for inspecting a substrate, comprising:
- recording a baseline dark field;
- directing a light source toward a field of view to be examined;
- receiving the field of view in a camera;
- comparing the received field of view to the baseline dark field;
- detecting at least one of a droplet, a particle or a surface obstruction (DPO) within the received field;
- and
- outputting a test result.
4 more elements
Dependencies are inferred from the claim text.