Back to results
US 2006/0139414 A1Published application
Piezoelectric device, piezoelectric actuator, piezoelectric pump, inkjet recording head, inkjet printer, surface acoustic wave device, thin-film piezoelectric resonator, frequency filter, oscillator, electronic circuit, and electronic instrument
AssigneeSeiko Epson Corporation
InventorsSetsuya Iwashita, Takeshi Kijima, Koji Ohashi
Life of this patent
Estimating the term…
Abstract
A piezoelectric device includes: a substrate; a first conductive layer formed over the substrate, the first conductive layer including at least one buffer layer formed of a (001) preferentially oriented lanthanum-based layered perovskite compound; a piezoelectric layer formed over the first conductive layer and including a piezoelectric having a perovskite structure; and a second conductive layer electrically connected with the piezoelectric layer.
Claims23
A piezoelectric device comprising:
- a substrate;
- a first conductive layer formed over the substrate, the first conductive layer including at least one buffer layer formed of a (001) preferentially oriented lanthanum-based layered perovskite compound;
- a piezoelectric layer formed over the first conductive layer and including a piezoelectric having a perovskite structure;
- and
- a second conductive layer electrically connected with the piezoelectric layer.
2 more elements
A piezoelectric device comprising:
- a substrate;
- a first conductive layer formed over the substrate;
- a piezoelectric layer formed over the first conductive layer and having a perovskite structure;
- and
- a second conductive layer electrically connected with the piezoelectric layer, the first conductive layer including at least one conductive oxide layer formed of a conductive oxide having a perovskite structure and at least one low-resistivity layer formed of a conductive material having a resistivity lower than a resistivity of the conductive oxide, the conductive oxide being (001) preferentially oriented.
2 more elements
A piezoelectric actuator having a piezoelectric device comprising:
- a substrate;
- a first conductive layer formed over the substrate, the first conductive layer including at least one buffer layer formed of a (001) preferentially oriented lanthanum-based layered perovskite compound;
- a piezoelectric layer formed over the first conductive layer and including a piezoelectric having a perovskite structure;
- and
- a second conductive layer electrically connected with the piezoelectric layer.
2 more elements
A piezoelectric pump having a piezoelectric device comprising:
- a substrate;
- a first conductive layer formed over the substrate, the first conductive layer including at least one buffer layer formed of a (001) preferentially oriented lanthanum-based layered perovskite compound;
- a piezoelectric layer formed over the first conductive layer and including a piezoelectric having a perovskite structure;
- and
- a second conductive layer electrically connected with the piezoelectric layer.
2 more elements
An inkjet recording head having a piezoelectric device comprising:
- a substrate;
- a first conductive layer formed over the substrate, the first conductive layer including at least one buffer layer formed of a (001) preferentially oriented lanthanum-based layered perovskite compound;
- a piezoelectric layer formed over the first conductive layer and including a piezoelectric having a perovskite structure;
- and
- a second conductive layer electrically connected with the piezoelectric layer.
2 more elements
An inkjet printer having a piezoelectric device comprising:
- a substrate;
- a first conductive layer formed over the substrate, the first conductive layer including at least one buffer layer formed of a (001) preferentially oriented lanthanum-based layered perovskite compound;
- a piezoelectric layer formed over the first conductive layer and including a piezoelectric having a perovskite structure;
- and
- a second conductive layer electrically connected with the piezoelectric layer.
2 more elements
A surface acoustic wave device having a piezoelectric device comprising:
- a substrate;
- a first conductive layer formed over the substrate, the first conductive layer including at least one buffer layer formed of a (001) preferentially oriented lanthanum-based layered perovskite compound;
- a piezoelectric layer formed over the first conductive layer and including a piezoelectric having a perovskite structure;
- and
- a second conductive layer electrically connected with the piezoelectric layer.
2 more elements
A thin-film piezoelectric resonator having a piezoelectric device comprising:
- a substrate;
- a first conductive layer formed over the substrate, the first conductive layer including at least one buffer layer formed of a (001) preferentially oriented lanthanum-based layered perovskite compound;
- a piezoelectric layer formed over the first conductive layer and including a piezoelectric having a perovskite structure;
- and
- a second conductive layer electrically connected with the piezoelectric layer.
2 more elements
A frequency filter having a piezoelectric device comprising:
- a substrate;
- a first conductive layer formed over the substrate, the first conductive layer including at least one buffer layer formed of a (001) preferentially oriented lanthanum-based layered perovskite compound;
- a piezoelectric layer formed over the first conductive layer and including a piezoelectric having a perovskite structure;
- and
- a second conductive layer electrically connected with the piezoelectric layer.
2 more elements
An oscillator having a piezoelectric device comprising:
- a substrate;
- a first conductive layer formed over the substrate, the first conductive layer including at least one buffer layer formed of a (001) preferentially oriented lanthanum-based layered perovskite compound;
- a piezoelectric layer formed over the first conductive layer and including a piezoelectric having a perovskite structure;
- and
- a second conductive layer electrically connected with the piezoelectric layer.
2 more elements
An electronic circuit having a piezoelectric device comprising:
- a substrate;
- a first conductive layer formed over the substrate, the first conductive layer including at least one buffer layer formed of a (001) preferentially oriented lanthanum-based layered perovskite compound;
- a piezoelectric layer formed over the first conductive layer and including a piezoelectric having a perovskite structure;
- and
- a second conductive layer electrically connected with the piezoelectric layer.
2 more elements
An electronic instrument having a piezoelectric device comprising:
- a substrate;
- a first conductive layer formed over the substrate, the first conductive layer including at least one buffer layer formed of a (001) preferentially oriented lanthanum-based layered perovskite compound;
- a piezoelectric layer formed over the first conductive layer and including a piezoelectric having a perovskite structure;
- and
- a second conductive layer electrically connected with the piezoelectric layer.
2 more elements
Dependencies are inferred from the claim text.