Systems and methods for a contactless electrical probe
OwnerDavid Dutton, Gloria Hofler +1inventors
InventorsDavid Dutton, Gloria Hofler, Michael Nystrom
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Abstract
There is disclosed a contactless test probe using an ionized gas discharge for making electrical contact with the device under test (DUT). In one embodiment the ionized gas discharge is at or below atmospheric pressure thereby reducing the complexity of the control environment. In one embodiment, the atmospheric gas discharge, i.e. the electrical probing medium, is created and controlled by a micro-hollow cathode. In a further embodiment an extension gate is used to extend/retard the range of the high-density discharge.
Claims24
A probe comprising:
- an orifice separated from a DUT by a gap;
- and
- a source of plasma for spanning said gap to said DUT.
A method of testing a DUT, said method comprising:
- generating a plasma plume extending to said DUT;
- and
- passing a test signal through said plasma plume to said DUT.
A test device comprising:
- means for providing test signals;
- and
- means spaced apart from a DUT for generating a plasma plume for providing an electrical path to said DUT for the passage of provided test signals.
A test probe comprising:
- an input for receiving gas under pressure;
- a plasma source;
- and
- a hollow cathode through which portions of said pressurized gas can escape into atmospheric pressure as a mass flow of discharge gas carrying electrons and ions, said discharge gas operable for carrying test signals from said probe to a DUT without said probe touching said DUT.
Dependencies are inferred from the claim text.