Rotation drive device and rotation drive method
AssigneeTokyo Electron Limited
InventorHideaki Sato
Life of this patent
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AssigneeTokyo Electron Limited
InventorHideaki Sato
Estimating the term…
This rotation driving apparatus includes a torque generating circuit 72 for generating a torque of a servo motor 30 with voltage supply from a power source 71 and a motor control circuit 73 for controlling rotation of the motor. In the torque generating circuit 72, a condenser 76 is arranged to detect a level of the supplied voltage and a period of voltage drop. A voltage-drop information detected by the condenser 76 can be transmitted to a host controller 70. The host controller 70 previously memorizes a power-recovery information having a voltage drop and a time under an instantaneous blackout capable of recovering within a predetermined period and a rotation control pattern information of the motor corresponding to the power-recovery information and further compares the voltage-drop information, the power-recovery information and the rotation control pattern information of the motor with each other. Based on a control signal, the controller 70 controls the rotation of the servo motor 30. Then, by controlling the rotation in correspondence with the voltage drop during the driving of the motor, it is carried out to suppress increasing of a driving period, improving the throughput and restricting vibration due to a rotational standstill of the motor by the voltage drop.
1-2. (canceled)
A rotation driving apparatus having a motor at least rotating at a high speed and a low speed, a torque generating circuit for generating a torque of the motor by a supply voltage from a power source, a motor control circuit for controlling rotation of the motor, a rotation detector for detecting a rotating speed of the motor and transmitting a detection signal to the motor control circuit and controller for delivering the rotating speed of the motor and a number of revolutions thereof to and from the motor control circuit, wherein
A rotation driving apparatus having a motor at least rotating at a high speed and a low speed, a torque generating circuit for generating a torque of the motor by a supply voltage from a power source, a motor control circuit for controlling rotation of the motor, a rotation detector for detecting a rotating speed of the motor and transmitting a detection signal to the motor control circuit and controller for delivering the rotating speed of the motor and a number of revolutions thereof to and from the motor control circuit, wherein
A rotation driving apparatus having a motor at least rotating at a high speed and a low speed, a torque generating circuit for generating a torque of the motor by a supply voltage from a power source, a motor control circuit for controlling rotation of the motor, a rotation detector for detecting a rotating speed of the motor and transmitting a detection signal to the motor control circuit and controller for delivering the rotating speed of the motor and a number of revolutions thereof to and from the motor control circuit, wherein
9-12. (canceled)
A rotation driving apparatus having a motor at least rotating at a high speed and a low speed, a torque generating circuit for generating a torque of the motor by a supply voltage from a power source, a motor control circuit for controlling rotation of the motor, a rotation detector for detecting a rotating speed of the motor and transmitting a detection signal to the motor control circuit and a controller for delivering the rotating speed of the motor and a number of revolutions thereof to and from the motor control circuit, wherein
A rotation driving apparatus having a motor at least rotating at a high speed and a low speed, a torque generating circuit for generating a torque of the motor by a supply voltage from a power source, a motor control circuit for controlling rotation of the motor, a rotation detector for detecting a rotating speed of the motor and transmitting a detection signal to the motor control circuit, and a controller for delivering the rotating speed of the motor and a number of revolutions thereof to and from the motor control circuit, wherein
A rotation driving method for a rotation driving apparatus having a motor at least rotating at a high speed and a low speed, a torque generating circuit for generating a torque of the motor by a supply voltage from a power source, and a voltage detector arranged in the torque generating circuit to detect a level of the supply voltage and a period of a voltage drop, comprising the steps of:
Dependencies are inferred from the claim text.