Organic light emitting devices and fabrication methods thereof
AssigneeAu Optronics Corporation
InventorTswen-Hsin Liu
Life of this patent
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Abstract
A method of modifying a work function of a conductor surface for use in organic light emitting devices. A plasma treatment is performed on the conductive layer. The plasma treatment employs a mixing gas comprising a nitrogen-containing gas for decreasing the work function and an oxygen-containing gas for increasing the work function. A flow ratio of the nitrogen-containing gas to the oxygen-containing gas is controlled to modify the work function.
Claims20
A method of modifying a work function of a conductor surface, comprising:
- providing a conductive layer, wherein a surface of the conductive layer comprises a work function;
- performing a plasma treatment on the conductive layer, wherein the plasma treatment employs a mixing gas comprising a first reactive gas for decreasing the work function and a second reactive gas for increasing the work function;
- and
- controlling a flow ratio of the first reactive gas to the second reactive gas to modify the work function.
A method of forming an organic light emitting device, comprising:
- providing a first conductive layer with a work function;
- performing a plasma treatment on the first conductive layer to modify the work function, so that a surface of the first conductive layer comprises a modified work function;
- forming an organic layer on the first conductive layer, wherein the first conductive layer comprises a hole transport layer with a HOMO (highest occupied molecular orbital) energy level adjacent to the first conductive layer;
- and
- forming a second conductive layer on the organic layer;
- wherein the plasma treatment employs a mixing gas comprising a first reactive gas for decreasing the work function and a second reactive gas for increasing the work function, and controls a flow ratio of the first reactive gas to the second reactive gas to make the modified work function equal or approximate to the HOMO energy level.
An organic light emitting device, comprising:
- a plasma treated conductive layer;
- an organic layer formed on the plasma treated conductive layer, wherein the organic layer comprises a hole transport layer with a HOMO (highest occupied molecular orbital) energy level adjacent to the plasma treated conductive layer;
- and
- a conductive layer formed on the organic layer;
- wherein the plasma treated conductive layer having a work function is treated with a plasma treatment to modify the work function, so that a surface of the plasma treated conductive layer comprises a modified work function;
- wherein the plasma treatment employs a mixing gas comprising a first reactive gas for decreasing the work function and a second reactive gas for increasing the work function, and controls a flow ratio of the first reactive gas to the second reactive gas to make the modified work function equal or approximate to the HOMO energy level.
Dependencies are inferred from the claim text.