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US 2006/0138906 A1Published application
Piezoelectric device, piezoelectric actuator, piezoelectric pump, inkjet recording head, inkjet printer, surface acoustic wave device, thin-film piezoelectric resonator, frequency filter, oscillator, electronic circuit, and electronic instrument
AssigneeSeiko Epson Corporation
InventorsSetsuya Iwashita, Takeshi Kijima, Koji Ohashi
Life of this patent
Estimating the term…
Abstract
A piezoelectric device including: a substrate; a first conductive layer formed over the substrate, the first conductive layer including a conductive oxide layer formed of a (001) preferentially oriented lanthanum nickelate, and the lanthanum nickelate having oxygen deficiency; a piezoelectric layer formed over the first conductive layer and including a piezoelectric having a perovskite structure; and a second conductive layer electrically connected with the piezoelectric layer.
Claims19
A piezoelectric device comprising:
- a substrate;
- a first conductive layer formed over the substrate, the first conductive layer including a conductive oxide layer formed of a (001) preferentially oriented lanthanum nickelate, and the lanthanum nickelate having oxygen deficiency;
- a piezoelectric layer formed over the first conductive layer and including a piezoelectric having a perovskite structure;
- and
- a second conductive layer electrically connected with the piezoelectric layer.
2 more elements
A piezoelectric actuator comprising a piezoelectric device,
- wherein the piezoelectric device includes:
- a substrate;
- a first conductive layer formed over the substrate, the first conductive layer including a conductive oxide layer formed of a (001) preferentially oriented lanthanum nickelate, and the lanthanum nickelate having oxygen deficiency;
- a piezoelectric layer formed over the first conductive layer and including a piezoelectric having a perovskite structure;
- and
- a second conductive layer electrically connected with the piezoelectric layer.
3 more elements
A piezoelectric pump comprising a piezoelectric device,
- wherein the piezoelectric device includes:
- a substrate;
- a first conductive layer formed over the substrate, the first conductive layer including a conductive oxide layer formed of a (001) preferentially oriented lanthanum nickelate, and the lanthanum nickelate having oxygen deficiency;
- a piezoelectric layer formed over the first conductive layer and including a piezoelectric having a perovskite structure;
- and
- a second conductive layer electrically connected with the piezoelectric layer.
3 more elements
An inkjet recording head comprising a piezoelectric device,
- wherein the piezoelectric device includes:
- a substrate;
- a first conductive layer formed over the substrate, the first conductive layer including a conductive oxide layer formed of a (001) preferentially oriented lanthanum nickelate, and the lanthanum nickelate having oxygen deficiency;
- a piezoelectric layer formed over the first conductive layer and including a piezoelectric having a perovskite structure;
- and
- a second conductive layer electrically connected with the piezoelectric layer.
3 more elements
An inkjet printer comprising a piezoelectric device,
- wherein the piezoelectric device includes:
- a substrate;
- a first conductive layer formed over the substrate, the first conductive layer including a conductive oxide layer formed of a (001) preferentially oriented lanthanum nickelate, and the lanthanum nickelate having oxygen deficiency;
- a piezoelectric layer formed over the first conductive layer and including a piezoelectric having a perovskite structure;
- and
- a second conductive layer electrically connected with the piezoelectric layer.
3 more elements
A surface acoustic wave device comprising a piezoelectric device,
- wherein the piezoelectric device includes:
- a substrate;
- a first conductive layer formed over the substrate, the first conductive layer including a conductive oxide layer formed of a (001) preferentially oriented lanthanum nickelate, and the lanthanum nickelate having oxygen deficiency;
- a piezoelectric layer formed over the first conductive layer and including a piezoelectric having a perovskite structure;
- and
- a second conductive layer electrically connected with the piezoelectric layer.
3 more elements
A thin-film piezoelectric resonator comprising a piezoelectric device,
- wherein the piezoelectric device includes:
- a substrate;
- a first conductive layer formed over the substrate, the first conductive layer including a conductive oxide layer formed of a (001) preferentially oriented lanthanum nickelate, and the lanthanum nickelate having oxygen deficiency;
- a piezoelectric layer formed over the first conductive layer and including a piezoelectric having a perovskite structure;
- and
- a second conductive layer electrically connected with the piezoelectric layer.
3 more elements
A frequency filter comprising a piezoelectric device,
- wherein the piezoelectric device includes:
- a substrate;
- a first conductive layer formed over the substrate, the first conductive layer including a conductive oxide layer formed of a (001) preferentially oriented lanthanum nickelate, and the lanthanum nickelate having oxygen deficiency;
- a piezoelectric layer formed over the first conductive layer and including a piezoelectric having a perovskite structure;
- and
- a second conductive layer electrically connected with the piezoelectric layer.
3 more elements
An oscillator comprising a piezoelectric device,
- wherein the piezoelectric device includes:
- a substrate;
- a first conductive layer formed over the substrate, the first conductive layer including a conductive oxide layer formed of a (001) preferentially oriented lanthanum nickelate, and the lanthanum nickelate having oxygen deficiency;
- a piezoelectric layer formed over the first conductive layer and including a piezoelectric having a perovskite structure;
- and
- a second conductive layer electrically connected with the piezoelectric layer.
3 more elements
An electronic circuit comprising a piezoelectric device,
- wherein the piezoelectric device includes:
- a substrate;
- a first conductive layer formed over the substrate, the first conductive layer including a conductive oxide layer formed of a (001) preferentially oriented lanthanum nickelate, and the lanthanum nickelate having oxygen deficiency;
- a piezoelectric layer formed over the first conductive layer and including a piezoelectric having a perovskite structure;
- and
- a second conductive layer electrically connected with the piezoelectric layer.
3 more elements
An electronic instrument comprising a piezoelectric device,
- wherein the piezoelectric device includes:
- a substrate;
- a first conductive layer formed over the substrate, the first conductive layer including a conductive oxide layer formed of a (001) preferentially oriented lanthanum nickelate, and the lanthanum nickelate having oxygen deficiency;
- a piezoelectric layer formed over the first conductive layer and including a piezoelectric having a perovskite structure;
- and
- a second conductive layer electrically connected with the piezoelectric layer.
3 more elements
Dependencies are inferred from the claim text.