Closed-loop feedback control positioning stage
AssigneeIndustrial Technology Research Institute
InventorsYi-Ming Chu, Wei-Han Wang, Chao-Chi Wu
Life of this patent
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Abstract
Provided is a closed-loop feedback control positioning stage comprising at least one block formed therein, a plurality of hinge mechanisms for attaching the block in the stage, at least one actuator formed in the block, the actuator adapted to bend for moving the block in at least one direction, and a plurality of strain gauges each attached in a corresponding hinge mechanism for measuring its strain. The invention can repeatedly position the block at the moved location for carrying out a highly precise positioning of the stage.
Claims10
Positioning device controlled by a closed-loop feedback system, comprising:
- a stage;
- at least one block formed in the stage;
- a plurality of hinge mechanisms for attaching the block in the stage;
- at least one actuator formed in the block, the actuator adapted to bend for moving the block in at least one direction;
- and
- a plurality of strain gauges each attached in a corresponding hinge mechanism for measuring its strain.
Dependencies are inferred from the claim text.