Nanopositioner

Nanometric positioning device containing a foundation element with attached crude positioning stage capable of backward and forward travel with regard to it, wherein:

• on top of the crude stage is attached a fine positioning stage with an executing element and capable of backward and forward travel with regard to the crude stage;
• the crude positioning stage is kinematically coupled to the foundation element as well as coupled to the fine positioning stage, allowing both crude and fine stages to move independently with respect to the foundation element;
• the kinematic coupling of the crude and fine positioning stages allows for autonomous movement of the executing element with regard to both crude stage and, correspondingly, to the foundation element;
• the mounting of the crude and fine stages is such that it allows their respective movement along both coordinate axes of the plane;
• the crude stage is executed in the form of a rigid bearing plate carrying a rigidly fixed frame inside which the fine stage's executing element is situated;
• the latter can move and be fixed in a given position by mean of pairs of nanometer range positioning elements on each one of the four sides of the frame;
• and
• the margin of error in the positioning of the crude stage is smaller than the range of fine stage positioning along either of the two coordinate axes.