Method of manufacturing semiconductor device, semiconductor device, stacked semiconductor device, circuit board and electronic instrument

A method of manufacturing a semiconductor device comprising:

• preparing a semiconductor wafer containing a plurality of semiconductor element sections;
• forming a conductive portion by forming holes in an active surface of the semiconductor element sections, forming an insulating film in the holes, and embedding a conductive material which protrudes from the active surface via the insulating film;
• forming a first groove in a cutting area provided on a periphery of an element area of an active surface of the semiconductor wafer so as not to pass through the semiconductor wafer;
• bonding the semiconductor water and a support body via an adhesive layer;
• thinning the semiconductor wafer by grinding a rear surface on an opposite side from the active surface, while maintaining the insulating film not exposed;
• forming a second groove in the rear surface so as not to pass through to the first groove on the opposite side;
• separating each of the semiconductor element sections to make a plurality of semiconductor chips, by connecting the first groove and the second groove while thinning the semiconductor wafer by isotropic etching from the rear surface of the semiconductor wafer so as to expose the insulating film;
• exposing the conductive portion from the insulating film by etching from the rear surface, to form feedthrough electrodes in each of the semiconductor element sections;
• and,
• separating the semiconductor element sections into individual pieces by peeling the plurality of semiconductor chips off from the support body.