Semiconductor members having a halogenated polymeric coating and methods for their formation
AssigneeTessera, Inc.
InventorJesse Thompson
Life of this patent
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Abstract
A coated semiconductor member is provided having a carbon-containing halogenated polymeric coating bonded to a surface thereof. The semiconductor member may take any of a number of forms, such as the form of a chip or a wafer containing one or more microelectronic devices. The coating may be bonded to the surface in a manner and quantity effective to provide the member an increased strength. In addition or in the alternative, the coating may improve the electrical performance of the member. Optionally, the coating has a microstructure associated with vapor phase in situ addition polymerization. Also provided is a method for coating a semiconductor member.
Claims38
A coated semiconductor member, comprising:
- a member containing no fluid-transporting feature, having front and rear surfaces, and comprising a semiconductor microelectronic device that is electrically accessible from the front surface;
- and
- a non-reworkable carbon-containing halogenated polymeric coating bonded to at least one of the surfaces, wherein any fluorinated but not chlorinated polymer, if present in the coating, has a microstructure associated with vapor phase in situ addition polymerization.
A coated semiconductor member exhibiting an increased strength, comprising:
- a member comprising a semiconductor and having a surface, wherein the member is associated with a precoat strength;
- and
- a carbon-containing halogenated polymeric coating bonded to the surface in a manner and quantity effective to provide the member an increased strength that is at least 4% higher than the precoat strength.
A coated semiconductor member exhibiting an increased strength, comprising:
- a member comprising a single crystalline semiconductor and having a surface, wherein the member is associated with a precoat strength;
- and
- a carbon-containing polymeric coating bonded covalently to the surface in a quantity effective to provide the member an increased strength that is at least 4% higher than the precoat strength.
A coated semiconductor member exhibiting an increased strength, comprising:
- a member comprising a semiconductor and having a surface, wherein the member is associated with a precoat strength;
- and
- a carbon-containing halogenated polymeric coating having a thickness of about 1 μm to about 50 μm bonded to the surface in a manner effective to provide the member an increased strength that is at least 4% higher than the precoat strength.
A coated semiconductor member, comprising:
- a member comprising a semiconductor and having a surface;
- and
- a nonreworkable carbon-containing fluorinated and chlorinated polymeric coating bonded to the surface.
A coated semiconductor member, comprising:
- a member comprising a semiconductor and having a surface;
- and
- a halogenated polymeric coating bonded to the surface, wherein the coating contains a cyclic moiety and a —SiO moiety.
A method for coating a semiconductor member, comprising:
- (a) dispensing a fluid onto one or more surfaces of a member containing no fluid-transporting feature, having front and rear surfaces, and comprising a semiconductor microelectronic device that is electrically accessible from the front surface;
- and
- (b) subjecting the fluid to conditions effective to produce a nonreworkable carbon-containing halogenated polymeric coating bonded to the one or more surfaces onto which the fluid is dispensed, wherein any fluorinated but not chlorinated polymer, if present in the coating, has a microstructure associated with vapor phase in situ addition polymerization.
A method for coating a semiconductor member, comprising:
- (a) dispensing a fluid onto a surface of a member having a surface and comprising a semiconductor;
- and
- (b) subjecting the fluid to conditions effective to produce a carbon-containing halogenated polymeric coating bonded to the surface in a manner and quantity effective to provide the member an increased strength that is at least 4% higher than the precoat strength.
Dependencies are inferred from the claim text.