Solid-state image sensor, method of manufacturing the same, and camera
AssigneePanasonic Corporation
InventorHiroshi Sakoh
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Abstract
A solid-state image sensor of the present invention is a solid-state image sensor in which pixel cells are arranged on a semiconductor substrate, wherein each of the pixel cells includes: a photoelectric conversion unit that performs photoelectric conversion of incident light; and a microlens formed above the photoelectric conversion unit, the microlens corresponding to the photoelectric conversion unit, wherein the microlens includes a transparent layer and a color filter layer.
Claims14
A solid-state image sensor in which pixel cells are arranged on a semiconductor substrate,
- wherein each of said pixel cells includes:
- a photoelectric conversion unit operable to perform photoelectric conversion of incident light;
- and
- a microlens formed above said photoelectric conversion unit, the microlens corresponding to said photoelectric conversion unit,
- wherein said microlens includes a transparent layer and a color filter layer.
A method of manufacturing a solid-state image sensor in which pixel cells are arranged on a semiconductor substrate, the pixel cells including (a) respective photoelectric conversion units operable to perform photoelectric conversion of incident light, and (b) microlenses formed above the respective photoelectric conversion units, the microlenses corresponding to the respective photoelectric conversion units, said method comprising:
- forming the photoelectric conversion units on the semiconductor substrate;
- forming a flattening film on the photoelectric conversion units;
- and
- forming, on the flattening film, the microlenses corresponding to the respective photoelectric conversion units, each of the microlenses including a transparent layer and a color filter layer.
A camera equipped with the solid-state image sensor in which pixel cells are arranged on a semiconductor substrate,
- wherein each of the pixel cells includes:
- a photoelectric conversion unit operable to perform photoelectric conversion of incident light;
- and
- a microlens formed above the photoelectric conversion unit, the microlens corresponding to the photoelectric conversion unit,
- wherein the microlens includes a transparent layer and a color filter layer.
Dependencies are inferred from the claim text.