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US 2006/0138495 A1Published application
Method and apparatus for collecting photons in a solid state imaging sensor
AssigneeMicron Technology, Inc.
InventorsJin Li, Jiutao Li
Life of this patent
Estimating the term…
Abstract
A photon collector has a reflecting metal layer to increase photon collection efficiency in a solid state imaging sensor. The reflecting metal layer reflects incident light internally to a photosensor. A plurality of photon collectors is formed in a wafer substrate over an array of photosensors. The photon collector is formed in an opening in an insulating layer provided over each photosensor.
Claims15
1-23. (canceled)
A method of fabricating an imaging device, said method comprising:
- forming a plurality of photosensors on a wafer;
- forming a structure with sidewalls in an insulating layer on said wafer provided over said photosensors;
- and
- depositing a reflecting material on said sidewalls of each structure.
1 more element
A method of fabricating an imaging device, said method comprising:
- forming a photodiode beneath an insulating layer;
- providing an etch stop layer over said photodiode;
- etching an opening in the semiconductor substrate above the photodiode to said etch stop layer;
- depositing a light-reflecting metal on sidewalls of said opening with a collimated source of said light-reflecting metal;
- and
- filling said opening with a optically transparent material.
3 more elements
37-41. (canceled)
Dependencies are inferred from the claim text.