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US 2006/0138451 A1Published application
Structure having light modulating film and light control device using the same
AssigneeRohm Co., Ltd.
InventorsYoshikazu Fujimori, Takashi Nakamura
Life of this patent
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Abstract
A structure includes a substrate and a light modulating film formed on top of the substrate. The light modulating film is made of polycrystalline PLZT containing Pb, Zr, Ti, and La as constituent elements. The film has a La concentration in the range of 5 at % to 30 at %. The relative dielectric constant at a frequency of 1 MHz is higher than or equal to 1200.
Claims19
A structure comprising:
- a substrate;
- and
- a light modulating film formed on top of the substrate, wherein the light modulating film has a relative dielectric constant of 1200 or higher at a frequency of 1 MHz.
A structure comprising:
- a substrate;
- and
- a light modulating film formed on top of the substrate, wherein:
- the light modulating film is made of polycrystalline PLZT containing Pb, Zr, Ti, and La as constituent elements;
- a La concentration in the film falls within a range of 5 at % to 30 at %;
- and
- grains constituting the polycrystalline PLZT have an average grain size of 800 nm or greater.
4 more elements
A structure comprising:
- a substrate;
- and
- a light modulating film formed on top of the substrate, wherein:
- the light modulating film is made of polycrystalline PLZT containing Pb, Zr, Ti, and La as constituent elements;
- a La concentration in the film falls within a range of 5 at % to 30 at %;
- and
- a value of I(111)/I(110) is higher than or equal to 1, where I(110) is X-ray diffraction intensity on the (110) plane of the polycrystalline PLZT, and I(111) is X-ray diffraction intensity on the (111) plane.
4 more elements
Dependencies are inferred from the claim text.