Organic-inorganic composite insulating material for electronic element, method of producing same and field-effect transistor comprising same
AssigneeFuji Xerox Co., Ltd.
InventorsShinsuke Okada, Masaki Hirakata, Miho Watanabe, Taishi Shigematsu, Shigeki Ooma, Chikara Manabe
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Abstract
A method of producing an organic-inorganic composite insulating material for electronic element comprises subjecting a mixture of an organic polymer or its solution and a metal alkoxide or its solution as a starting material to sol-gel reaction of the metal alkoxide in the presence of the organic polymer.
Claims10
A method of producing an organic-inorganic composite insulating material for electronic element, the method comprising
- subjecting a mixture of an organic polymer or its solution and a metal alkoxide or its solution as a starting material to sol-gel reaction of the metal alkoxide in the presence of the organic polymer.
An organic-inorganic composite insulating material for electronic element, comprising an organic polymer dispersed in an inorganic polymer structure,
- wherein the organic-inorganic composite insulating material is produced by subjecting a mixture of an organic polymer or its solution and a metal alkoxide or its solution as a starting material to sol-gel reaction of the metal alkoxide in the presence of the organic polymer.
Dependencies are inferred from the claim text.