Optical sensor circuit combining functions of open and close type optical sensor circuits
AssigneeSamsung Electronics Co., Ltd.
InventorSin-Hyun Cho
Life of this patent
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Abstract
An optical sensor circuit comprises an optical sensor adapted to sense a position of a component in a semiconductor manufacturing apparatus according to the presence or absence of a flag and output a signal indicative of the position. A position sensing driver receives the signal via a path selected by a plurality of switches and then drives an output signal in response to the signal. The path selected by the plurality of switches causes the optical sensor circuit to act as either a close-type optical sensor circuit or an open-type optical sensor circuit.
Claims17
An optical sensor circuit adapted for use in a semiconductor manufacturing apparatus, the optical sensor circuit comprising:
- an optical sensor adapted to sense a position of a component in the semiconductor manufacturing apparatus according to the presence or absence of a flag and output a signal indicative of the position;
- and,
- a position sensing driver receiving the signal via a path selected by a plurality of switches and driving an output signal in response to the signal.
An optical sensor circuit adapted for use in a semiconductor manufacturing apparatus, the optical sensor circuit comprising:
- an optical sensor adapted to sense a position of a component in the semiconductor manufacturing apparatus according to the presence or absence of a flag;
- a pull-up resistor connected between a power supply and the optical sensor;
- a pull-down resistor connected between the optical sensor and ground;
- a first switch connected between the power supply and the optical sensor;
- a second switch connected between the optical sensor and ground;
- a position sensing driver comprising a transistor having a base, an emitter, and a collector;
- a third switch connected between the optical sensor and the base of the transistor;
- and,
- a fourth switch connected between the base of the transistor and the optical sensor.
Dependencies are inferred from the claim text.