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AssigneeJEOL Ltd.
InventorsRyoichi Ichikawa, Akihiko Haraguchi, Yuji Hasegawa, Naohito Inoue, Kazutomo Shimizu
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A method and apparatus for correcting drift of the beam irradiation position during automated FIB (focused ion beam) processing with a reference image-setting unit, an image read-in unit for reading in images of the reference image region during the FIB processing, an arithmetic-and-control unit for finding the direction and amount of image deviation between the subsequent images, and a beam deflection system-adjusting unit for correcting the beam deflection system by correcting the image deviation based on the deviation in response to the output from the arithmetic-and-control unit. The arithmetic-and-control unit optimizes the brightness or contrast of the reference image.
A method of correcting drift during automated FIB processing of a sample, comprising the steps of:
An apparatus for correcting drift during automated FIB processing of a sample, said apparatus comprising:
Dependencies are inferred from the claim text.