Electron beam irradiation apparatus, electron beam irradiation method, and apparatus for and method of manufacturing disc-shape object

Abstract

An electron beam irradiation apparatus and method capable of easily curing at least part of a surface layer and/or a resin layer, each composed of materials that are hard to be cured by irradiation of ultraviolet rays, and capable of substantially uniformizing an integrated irradiation dose of electron beams over an entire irradiated surface. A disc-shaped object manufacturing apparatus and method capable of efficiently forming, on the disc-shaped object, at least part of a surface layer and/or a resin layer. An electron beam irradiation apparatus has a rotary driving unit for rotationally driving a disc-shaped object, a shield container for rotatably accommodating the disc-shaped object, and an electron beam irradiation unit provided in the shield container so that an irradiated surface on the surface of the disc-shaped object is irradiated with electron beams.

Dependencies are inferred from the claim text.