Irradiation device for testing objects coated with light-sensitive paint

A device comprising:

• a chamber for receiving an object;
• an EUV radiation source for directing a beam through a beam path toward the object, the EUV radiation source comprising a laboratory source for EUV radiation;
• an optical system for filtering radiation from the EUV radiation source, the optical system having at least one filter for suppressing undesirable spectral components of the radiation and also at least one mirror for spectrally filtering in-band EUV radiation;
• a plurality of closable diaphragm apertures located in the beam path, the plurality of closable diaphragm apertures enabling a temporal control of irradiation of irradiation fields that lie on the object and are situated downstream of the diaphragm apertures;
• and
• at least one monitor detector arranged downstream of the optical system in the direction of the beam path, the monitor detector detecting an irradiation dose during irradiation.

A method for irradiating an object, the method comprising:

• directing an EUV radiation beam from a laboratory source;
• filtering the EUV radiation beam to suppress undesirable spectral components of the radiation;
• spectrally filtering the EUV radiation beam in an in-band EUV range;
• detecting a radiation dose during irradiation by the EUV radiation beam;
• and
• interrupting a beam path of the EUV radiation beam by closing ones of a plurality of closable diaphragm apertures, wherein each diaphragm aperture is closed at an instant when the detecting ascertains that the radiation dose corresponds to a desired value.

A device for the test irradiation of objects coated with photosensitive resists, the device comprising:

• an EUV radiation source;
• an optical system for filtering radiation from the EUV radiation source;
• a chamber for receiving an object, the object being in a beam path of the radiation;
• means for interrupting the beam path onto the object;
• and
• at least one monitor detector arranged downstream of the optical system in the direction of the beam path;
• wherein:
• the EUV radiation source is a laboratory source for EUV radiation;
• the optical system has at least one filter for suppressing undesirable spectral components of the radiation and also at least one mirror for spectrally filtering radiation in an in-band EUV range;
• the means for interrupting the beam path comprises a plurality of closable diaphragm apertures that enable a temporal control of the irradiation of irradiation fields that lie on the object and are situated downstream of the diaphragm apertures;
• and
• the at least one monitor detector detects the radiation dose during irradiation.