Method of forming a metal oxide film and microwave power source unit for use in the method
AssigneeToyo Seikan Kaisha, Ltd.
InventorsTsunehisa Namiki, Toshihide Ieki, Hideo Kurashima, Hajime Inagaki, Akira Kobayashi, Koji Yamada
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Abstract
A method of forming a metal oxide film by the plasma CVD method and comprising reacting chiefly an organometal by a glow discharge in a low output region and, then, reacting the organometal with an oxidizing gas by the glow discharge in a high-output region to form a metal oxide film on the surface of a plastic substrate via an organic layer. This method forms a thin film having excellent adhesiveness, softness and flexibility on the surface of a plastic substrate relying on the plasma CVD method.
Claims26
A method of forming a metal oxide film having a gas-barrier property on a surface of a predetermined substrate by reacting an organometal with an oxidizing gas by the plasma CVD method, wherein a reaction between organometals is chiefly carried out by the glow discharge in a low-output region and, then, organometals are reacted with the oxidizing gas by the glow discharge in a high-output region.
A microwave power source device for driving a microwave-generating unit by applying a voltage, comprising:
- a voltage-adjusting circuit for determining a peak output in said applied voltage;
- an ON time-adjusting circuit for determining an ON time of said applied voltage;
- and
- an applied voltage control circuit for forming waveforms of said applied voltage based on said peak output from said voltage-adjusting circuit and/or on said ON time from said ON time-adjusting circuit.
A microwave power source device for driving a microwave-generating unit by applying a voltage, comprising:
- a voltage-adjusting circuit for determining a peak output in said applied voltage;
- an ON time-adjusting circuit for determining an ON time of said applied voltage based on said peak output in said applied voltage determined by said voltage-adjusting circuit;
- and
- an applied voltage control circuit for forming waveforms of said applied voltage based on said ON time from said ON time-adjusting circuit.
Dependencies are inferred from the claim text.