Method of making an angled tip for a scanning force microscope
OwnerHongtao Cuiinventor
Life of this patent
Estimating the term…
Abstract
A method of making a microscope probe includes the steps of: providing a cantilever; depositing a masking layer on a surface of the cantilever; developing a deterministic spot of the masking layer; removing the deterministic spot of the masking layer from the cantilever to form a deterministic spot of exposed cantilever; depositing a layer of nanostructure-growth catalyst directly on and in contact with the cantilever at the deterministic spot of exposed cantilever; removing the masking layer from the cantilever so that a dot of the catalyst remains on the cantilever at the deterministic spot; and growing a nanostructure at the deterministic spot.
Claims11
A method of making a microscope probe comprising the steps of:
- a. providing a cantilever;
- b. depositing a masking layer on a surface of said cantilever;
- c. developing a deterministic spot of said masking layer;
- d. removing said deterministic spot of said masking layer from said cantilever to form a deterministic spot of exposed cantilever;
- e. depositing a layer of nanostructure-growth catalyst directly on and in contact with said cantilever at said deterministic spot of exposed cantilever;
- f. removing said masking layer from said cantilever so that a dot of said catalyst remains on said cantilever at said deterministic spot;
- and
- g. growing a nanostructure at said deterministic spot.
Dependencies are inferred from the claim text.