Oscillating shielded cylindrical target assemblies and their methods of use
OwnerKlaus Hartiginventor
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Abstract
The present invention relates to an oscillating shielded cylindrical target assembly comprising a cylindrical target, a motor assembly adapted to oscillate the cylindrical target, a shield, and a magnet assembly. Embodiments of the present invention also include a cylindrical target that has an outer surface containing a plurality of divided sections; the sections being disposed lengthwise around the target to form strips running lengthwise across the target. Each section includes a single sputtering material, such as silver, titanium, or niobium, that is intended to be applied as a separate coating on a substrate, such as glass.
Claims29
An oscillating cylindrical target assembly for use in a magnetron sputtering system comprising:
- a cylindrical target including a surface having one or more coating sections and an axis about which the cylindrical target rotationally oscillates;
- a magnet assembly including one or more magnets extending along an interior surface of the cylindrical target and extending a circumferential distance therearound;
- and
- a motor assembly operably adjoined to the cylindrical target and adapted to oscillate the cylindrical target.
A method of coating a substrate comprising the steps of:
- providing a magnetron sputtering system comprising a cylindrical target assembly including a cylindrical target having a surface with a plurality of sections, each section having a single coating material;
- rotating the cylindrical target until a single coating section having a coating material is positioned for exposure to a plasma;
- moving a substrate into the magnetron sputtering system;
- and
- exposing the section to a plasma until the substrate is coated with a layer of coating material.
A multi-sectional cylindrical target comprising a backing and two or more adjacent sections, each section having a single coating material differing from the coating material of an adjacent section.
A method of preparing a multi-sectional cylindrical target comprising:
- administering a coating material to a section of a backing;
- rotating the backing to a section not covered with a coating material;
- administering a coating material to the uncovered section that is different from the coating material of an adjacent section.
Dependencies are inferred from the claim text.