Plasma processing apparatus
AssigneeAdvanced Display Process Engineering Co., Ltd.
InventorsYoung Lee, Jun Choi, Saeng Jo, Young-Joo Hwang, Jong-Cheon Kim
Life of this patent
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Abstract
A plasma processing apparatus for generating plasma in a chamber maintained in a vacuum state and processing a substrate using the plasma. The plasma processing apparatus includes a refrigerant channel for circulating a refrigerant formed in a shower head, thereby easily controlling the temperature of the shower head and improving the reproducibility of plasma treatment.
Claims12
A plasma processing apparatus for generating plasma in a chamber maintained in a vacuum state and processing a substrate using the plasma, comprising:
- upper and lower electrodes respectively provided in upper and lower portions of the chamber for applying high-frequency power into the chamber;
- a shower head connected to the lower portion of the upper electrode for diffusing a process gas into the chamber;
- a refrigerant channel passing through the shower head in the horizontal direction for providing a passage for passing a refrigerant;
- and
- a refrigerant circulating unit connected to both ends of the refrigerant channel for supplying the refrigerant to one end of the refrigerant channel and collecting the refrigerant from the other end of the refrigerant channel to circulate the refrigerant.
A plasma processing apparatus for generating plasma in a chamber maintained in a vacuum state and processing a substrate using the plasma, comprising:
- upper and lower electrodes respectively provided in upper and lower portions of the chamber for applying high-frequency power into the chamber;
- a shower head connected to an edge portion protruded downwardly from the lower surface of the upper electrode for diffusing a process gas into the chamber;
- a refrigerant channel passing through the upper electrode in the horizontal direction for providing a passage for passing a refrigerant supplied from the outside;
- a heat transmission unit contacting the upper surface of the shower head and the lower surface of the upper electrode for transmitting the heat of the shower head to the upper electrode;
- and
- a refrigerant circulating unit connected to both ends of the refrigerant channel for supplying the refrigerant to one end of the refrigerant channel and collecting the refrigerant from the other end of the refrigerant channel.
Dependencies are inferred from the claim text.